Xu Rui Optoelectronics has introduced Nuofa PECVD LED coating system

[High-tech LED News] On July 3, Nuofa announced that it has provided a VECTOR (R) plasma enhanced chemical vapor deposition (PECVD) equipment to Xurui Optoelectronics. The new equipment will be installed in Foshan Xurui Optoelectronics. In the production workshop, it is used to produce high-efficiency LEDs with metal-based vertical structures.

Novo said its new VECTOR LED coating system is the most productive PECVD system in the LED chip manufacturing industry, including photoresist removal, physical vapor deposition, electroplating, and wafer polishing and thinning system solutions, which will enter the existing Xu Rui Optoelectronics system. LED chip production line.

Cost per wafer and cost per lumen are key factors driving the mainstream lighting market to embrace LED technology. The existing LED manufacturing technology is mainly based on 2-4 inch sapphire substrate with different diameters for epitaxial growth. This method has low production efficiency and high energy consumption. A 2-inch sapphire substrate LED is prepared, and the average power consumption is up to 200kWh. .

According to Nuofa, compared with traditional LED coating equipment, VECTOR system is in the leading position in the industry because it has a wide process window and high productivity, which reduces the cost per LED of LED. The VECTOR LED coating system has a multi-wafer carrier unit capable of placing 2, 3, 4, 6, 8 and 12-inch wafers of different sizes with large throughput and good quality and uniformity of deposited films of various sizes. The VECTOR LED system deposits thin films at lower temperatures, which is easier to control and more energy efficient than conventional LED PECVD equipment.

Xu Rui Optoelectronics Co., Ltd. is a joint venture company based in Foshan. It officially opened on May 23 this year. One of its shareholders is the US LED chip manufacturer SemiLEDs Corporation. Its LED chip project is the only project for SemiLEDs to invest in mainland China. It covers an area of ​​100 mu and has a total investment of more than 350 million US dollars. It will specialize in producing high-power high-brightness LED chip products.

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